Fatemeh Ahmadi

MEMS Technology

By admin | November 6, 2015 | 1 Comment


Imagine a machine so small that it is imperceptible to the human eye. Imagine working machines no bigger than a grain of pollen. Imagine thousands of these machines batch fabricated on a single piece of silicon, for just a few pennies each. Imagine a world where gravity and inertia are no longer important, but atomic forces and surface science dominate. Imagine a silicon chip with thousands of microscopic mirrors working in unison, enabling the all optical network and removing the bottlenecks from the global telecommunications infrastructure. You are now entering the microdomain, a world occupied by an explosive technology known as MEMS. (Ref-1)

Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of integrated microelectronics. (Ref-2)



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